Modeling of high power impulse magnetron sputtering discharges with tungsten target
نویسندگان
چکیده
Abstract The ionization region model (IRM) is applied to a high power impulse magnetron sputtering discharge with tungsten target. IRM gives the temporal variation of various species and average electron energy, as well internal parameters such probability back-attraction sputtered species. It shown that an initial peak in current due argon ions bombarding cathode After peak, W + become dominating remain end pulse. We demonstrate how contribution total at target surface increases increased voltage for densities J D,peak range 0.33–0.73 A cm −2 . For increases, while decreases increasing voltage. Furthermore, we discuss findings terms generalized recycling compare experimentally determined deposition rates find good agreement.
منابع مشابه
High power impulse magnetron sputtering discharge
J. T. Gudmundsson, N. Brenning, Daniel Lundin and Ulf Helmersson, High power impulse magnetron sputtering discharge, 2012, Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, (30), 030801. http://dx.doi.org/10.1116/1.3691832 Copyright: American Vacuum Society, This article may be downloaded for personal use only. Any other use requires prior permission of the author and the ...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2022
ISSN: ['1361-6595', '0963-0252']
DOI: https://doi.org/10.1088/1361-6595/ac774a